In this research work, a comparison study has been carried out between Palladium (Pd) coated PMMA (Poly Methyl Meth acryl ate) optical sensor and Palladium thin films sensor that have been prepared on glass substrates. PMMA were sputter coated with Palladium using a sputter coating facility offered by the He riot Watt University, during sputter coating the target (palladium) is showered with argon gas such that atoms from the target are ejected by the ionized gas and then deposited on the PMMA substrate. Palladium thin films have been prepared on glass substrates by vaporization deposition technique with annealing temperature is around 600? C. Relative inertness of the sensors to relative humidity makes it specific to detect hydrogen at low concentration. Target environments for the proposed sensors are fuel cell cabinets, industrial process plants, submarines, nuclear fuel power generation and decommissioning plants. Results showed that optical characteristics of the prepared sensors are highly sensitive, but their properties considerably vary when the measurements conducted in vacuum or in air. In the two sensors the response-recovery time of Pd materials to hydrogen gas characterized to be extremely short.
Micro electro mechanical systems, Palladium, Poly Methyl Meth acryl ate (PMMA), Sensor, Spectrometer, Substrates, Thin-Film.
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